Nonlinear saturation mechanism of ion-ion instability due to particle trapping effectMATSUKUMA, Masaaki; KAWAI, Yoshinobu.Journal of the Physical Society of Japan. 2001, Vol 70, Num 12, pp 3560-3564, issn 0031-9015Article

Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmasMATSUKUMA, Masaaki; HAMAGUCHI, Satoshi.Thin solid films. 2008, Vol 516, Num 11, pp 3443-3448, issn 0040-6090, 6 p.Conference Paper

Time evolution of electrode voltage distribution in large-area capacitively coupled plasmasMATSUKUMA, Masaaki; HAMAGUCHI, Satoshi.Thin solid films. 2007, Vol 515, Num 12, pp 5188-5192, issn 0040-6090, 5 p.Conference Paper